GB/T 43313-2023
China national
standard english version:
GB
中华人民共和国国家标准
NATIONAL
STANDARD OF THE PEOPLE'S REPUBLIC OF CHINA
GB/T 43313-2023
Testing of surface quality and microtube density of polished silicon carbide wafers by confocal differential interference method 碳化硅抛光片表面质量和微管密度的测试 共焦点微分干涉法
Issued Date:2023.11.27
Implemented Date:2024.6.1
Issued by:
The Standardization Administration of the People's Republic of China